Inventor
George M. Gammel
Inventor
Marblehead, MA, US
Overview
Patents· 13 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps46%
C23CCoating metallic material15%
G21KHandling of particles or ionising radiation not otherwise provided for8%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h108%
G01TMeasurement of nuclear or x-radiation4%
H01LSemiconductor devices4%
H10FInorganic semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation4%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h104%
Y02EReduction of greenhouse gas [ghg] emissions, related to energy generation, transmission or distribution4%
Y02PClimate change mitigation technologies in the production or processing of goods4%
PatentTitleYear
10,431,421Apparatus and techniques for beam mapping in ion beam system20199,738,968'Apparatus and method for controlling implant process'20179,062,377'Reducing glitching in an ion implanter'20159,006,692'Apparatus and techniques for controlling ion implantation uniformity'20158,853,653'Apparatus and techniques for controlling ion implantation uniformity'20148,378,318'Fixed mask design improvements'20137,723,706'Horizontal and vertical beam angle measurement technique'20107,663,125'Ion beam current uniformity monitor, ion implanter and related method'20107,476,877'Wafer charge monitoring'20096,891,173'Ion implantation systems and methods utilizing a downstream gas source'20056,723,998'Faraday system for ion implanters'20046,528,804'Method and apparatus for low energy ion implantation'20035,153,430'Method and apparatus for measuring the momentum, energy, power, and power density profile of intense particle beams'1992Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1992Patents assigned to US ENERGY (1)· patent assignee history
1992Based in Merrick, NY, US· patent location history
2003–2015Patents assigned to VARIAN SEMICONDUCTOR EQUIPMENT (10)· patent assignee history
2003–2019Based in Marblehead, MA, US· patent location history
2013Patents assigned to GAMMEL GEORGE (1)· patent assignee history
2013Patents assigned to RIORDON BENJAMIN (1)· patent assignee history
2017–2019Patents assigned to VARIAN SEMICONDUCTOR EQUIPMENT ASS INC (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| VARIAN SEMICONDUCTOR EQUIPMENT | 10 | 2003–2015 |
| VARIAN SEMICONDUCTOR EQUIPMENT ASS INC | 2 | 2017–2019 |
| GAMMEL GEORGEself | 1 | 2013 |
| RIORDON BENJAMIN | 1 | 2013 |
| US ENERGY | 1 | 1992 |
Locations
| Location | Patents | Span |
|---|---|---|
| Marblehead, Massachusetts, US | 12 | 2003–2019 |
| Merrick, New York, US | 1 | 1992 |