Inventor
LIEQUAN LEE
Inventor
US
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G01Nprimary
G01NInvestigating or analysing materials by determining their chemical or physical properties31%
G01BMeasuring length, thickness or similar linear dimensions13%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light13%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices13%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1013%
G05BControl or regulating systems in general6%
G06NComputing arrangements based on specific computational models6%
H01LSemiconductor devices6%
PatentTitleYear
11,796,390Bandgap measurements of patterned film stacks using spectroscopic metrology202311,422,095Scatterometry modeling in the presence of undesired diffraction orders202211,378,451Bandgap measurements of patterned film stacks using spectroscopic metrology202211,380,594Automatic optimization of measurement accuracy through advanced machine learning techniques202211,156,548Measurement methodology of advanced nanostructures2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2022Patents assigned to KLA TENCOR CORP (4)· patent assignee history
2021–2023Based in US· patent location history
2022–2023Patents assigned to KLA CORP (3)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KLA TENCOR CORP | 4 | 2021–2022 |
| KLA CORP | 3 | 2022–2023 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 5 | 2021–2023 |