Inventor
Dougyong Sung
Inventor
Seoul, KR
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
H01LSemiconductor devices21%
H02NElectric machines not otherwise provided for7%
H10BElectronic memory devices7%
B08BCleaning in general4%
B24CAbrasive or related blasting with particulate material4%
C23FNon-mechanical removal of metallic material from surface4%
H10DInorganic electric semiconductor devices4%
PatentTitleYear
10,854,485Electrostatic chuck, substrate processing apparatus, and method of manufacturing semiconductor device using the same202010,622,217Method of plasma etching and method of fabricating semiconductor device using the same202010,522,374Electrostatic chuck, substrate processing apparatus, and method of manufacturing semiconductor device using the same201910,224,228Electrostatic chucks and substrate processing apparatus including the same20199,691,618'Methods of fabricating semiconductor devices including performing an atomic layer etching process'20179,355,857'Substrate manufacturing method and substrate manufacturing apparatus'20167,442,114'Methods for silicon electrode assembly etch rate and etch uniformity recovery'2008Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2008Patents assigned to LAM RES CORP (1)· patent assignee history
2008Based in Fremont, CA, US· patent location history
2016–2020Patents assigned to SAMSUNG ELECTRONICS CO LTD (6)· patent assignee history
2016–2020Based in Seoul, KR· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SAMSUNG ELECTRONICS CO LTD | 6 | 2016–2020 |
| LAM RES CORP | 1 | 2008 |
Locations
| Location | Patents | Span |
|---|---|---|
| Seoul, KR | 6 | 2016–2020 |
| Fremont, California, US | 1 | 2008 |