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Inventor

Teruhiko Onoe

Inventor
Kofu, JP

Overview

1→
Patents
1989
Patent span
Physics
Primary field (CPC G)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices50%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1050%
PatentTitleYear
4,812,201'Method of ashing layers, and apparatus for ashing layers'1989

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1989Patents assigned to TOKYO ELECTRON LTD (1)· patent assignee history
1989Based in Kofu, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD11989
Locations
LocationPatentsSpan
Kofu, JP11989