Inventor
Kyu-hwan Chang
Inventor
Kyungki-do, KR
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1030%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests15%
H10DInorganic electric semiconductor devices11%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1011%
B08BCleaning in general7%
H10BElectronic memory devices7%
C11DDetergent compositions4%
C23CCoating metallic material4%
C25CProcesses for the electrolytic production, recovery or refining of metals4%
C25DProcesses for the electrolytic or electrophoretic production of coatings4%
PatentTitleYear
6,638,855'Method of filling contact hole of semiconductor device'20036,607,654'Copper-plating elecrolyte containing polyvinylpyrrolidone and method for forming a copper interconnect'20036,537,876'Method of manufacturing a semiconductor capacitor having a hemispherical grain layer using a dry cleaning process'20036,513,538'Method of removing contaminants from integrated circuit substrates using cleaning solutions'20036,335,287'Method of forming trench isolation regions'20026,277,204'Methods for cleaning wafers used in integrated circuit devices'20016,162,671'Method of forming capacitors having high dielectric constant material'20006,092,539'In-situ cleaning apparatuses for wafers used in integrated circuit devices and methods of cleaning using the same'20005,624,498'Showerhead for a gas supplying apparatus'1997Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1997–2003Patents assigned to SAMSUNG ELECTRONICS CO LTD (9)· patent assignee history
1997–2003Based in Kyungki-do, KR· patent location history
2000–2001Based in Seoul, KR· patent location history
2002–2003Based in Hongchun-gun, KR· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SAMSUNG ELECTRONICS CO LTD | 9 | 1997–2003 |
Locations
| Location | Patents | Span |
|---|---|---|
| Kyungki-do, KR | 5 | 1997–2003 |
| Hongchun-gun, KR | 2 | 2002–2003 |
| Seoul, KR | 2 | 2000–2001 |