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Inventor

Ansgar Holle

Inventor
Heidenheim, DE

Overview

1→
Patents
2020
Patent span
Physics
Primary field (CPC G)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

F16Cprimary
F16CShafts33%
G02BOptical elements, systems or apparatus33%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices33%
PatentTitleYear
10,571,816Assembly in a microlithographic projection exposure apparatus2020

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2020Patents assigned to ZEISS CARL SMT GMBH (1)· patent assignee history
2020Based in Heidenheim, DE· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
ZEISS CARL SMT GMBH12020
Locations
LocationPatentsSpan
Heidenheim, DE12020