Inventor
HIDEKI HORITA
Inventor
JP
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1028%
H01LSemiconductor devices22%
C23CCoating metallic material17%
C30BSingle-crystal growth11%
F04BPositive-displacement machines for liquids11%
G05BControl or regulating systems in general11%
PatentTitleYear
12,563,981Method of processing substrate, substrate processing apparatus, recording medium, and method of manufacturing semiconductor device202612,381,079Method of manufacturing semiconductor device, substrate processing apparatus, recording medium and method of processing substrate202512,341,000Substrate processing apparatus and recording medium202511,587,788Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium202311,236,743Substrate processing apparatus and recording medium2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to KOKUSAI ELECTRIC CORP (5)· patent assignee history
2022–2026Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KOKUSAI ELECTRIC CORP | 5 | 2022–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 5 | 2022–2026 |