Inventor
Terufumi Wakiyama
Inventor
Kumamoto, JP
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
B08BCleaning in general25%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests8%
PatentTitleYear
10,460,962Substrate processing apparatus201910,297,473Liquid processing apparatus201910,276,425Substrate processing system20199,953,848Substrate liquid processing apparatus20189,773,687'Liquid processing apparatus'20179,387,520'Liquid processing apparatus and cleaning method'20169,108,231'Liquid processing apparatus, liquid processing method, and computer-readable recording medium having program stored therein'20158,845,815'Liquid processing apparatus, liquid processing method, and computer-readable recording medium having program stored therein'2014Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2014–2019Patents assigned to TOKYO ELECTRON LTD (8)· patent assignee history
2014Patents assigned to OGATA NOBUHIRO (1)· patent assignee history
2014Patents assigned to WAKIYAMA TERUFUMI (1)· patent assignee history
2014–2019Based in Koshi, JP· patent location history
2015–2019Based in Kumamoto, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 8 | 2014–2019 |
| OGATA NOBUHIRO | 1 | 2014 |
| WAKIYAMA TERUFUMIself | 1 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Kumamoto, JP | 6 | 2015–2019 |
| Koshi, JP | 2 | 2014–2019 |