Inventor
Alex Minkovich
Inventor
Campbell, CA, US
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1031%
H01LSemiconductor devices19%
C23CCoating metallic material13%
B25JManipulators6%
B65GTransport or storage devices, e.g. conveyors for loading or tipping, shop conveyor systems or pneumatic tube conveyors6%
G01DMeasuring not specially adapted for a specific variable6%
G05BControl or regulating systems in general6%
G05DSystems for controlling or regulating non-electric variables6%
H05BElectric heating6%
PatentTitleYear
10,312,120Position and temperature monitoring of ALD platen susceptor201910,196,741Wafer placement and gap control optimization through in situ feedback20199,538,583'Substrate support with switchable multizone heater'20179,296,105'Vibration-controlled substrate handling robots, systems, and methods'20168,880,210'Methods and apparatus for processing substrates using model-based control'2014Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2014–2019Patents assigned to APPLIED MATERIALS INC (5)· patent assignee history
2014Patents assigned to DZILNO DMITRY A (1)· patent assignee history
2014Patents assigned to GREGOR MARIUSCH (1)· patent assignee history
2014Patents assigned to LANE JOHN W (1)· patent assignee history
2014Patents assigned to LI HONGBIN (1)· patent assignee history
2014–2019Based in Campbell, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 5 | 2014–2019 |
| DZILNO DMITRY A | 1 | 2014 |
| GREGOR MARIUSCH | 1 | 2014 |
| LANE JOHN W | 1 | 2014 |
| LI HONGBIN | 1 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Campbell, California, US | 5 | 2014–2019 |