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Inventor

Michitaka Aita

Inventor
Miyagi, JP

Overview

10→
Patents
2016–2020
Patent span
Electricity
Primary field (CPC H)

Patents· 10 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps43%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
H01LSemiconductor devices14%
C23CCoating metallic material10%
H10DInorganic electric semiconductor devices5%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h105%
PatentTitleYear
10,815,568Gas distribution device and processing apparatus202010,665,428Plasma processing apparatus202010,504,698Plasma processing apparatus201910,490,443Selective film forming method and method of manufacturing semiconductor device201910,312,057Plasma processing apparatus20199,761,418'Plasma processing apparatus'20179,646,867'Plasma processing apparatus, power supply unit and mounting table system'20179,574,270'Plasma processing apparatus'20179,343,270'Plasma processing apparatus'20169,324,542'Plasma processing method and plasma processing apparatus'2016

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2016–2020Patents assigned to TOKYO ELECTRON LTD (10)· patent assignee history
2016–2019Based in Miyagi, JP· patent location history
2016Based in Sendai, JP· patent location history
2019–2020Based in Nirasaki, JP· patent location history
2020Based in Yamanashi, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD102016–2020
Locations
LocationPatentsSpan
Miyagi, JP62016–2019
Nirasaki, JP22019–2020
Yamanashi, JP12020
Sendai, JP12016