Inventor
Eng Sheng Peh
Inventor
Singapore, SG
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
C23CCoating metallic material7%
H01JElectric discharge tubes or discharge lamps7%
B25JManipulators3%
F27BFurnaces, kilns, ovens or retorts in general3%
G01BMeasuring length, thickness or similar linear dimensions3%
G06TImage data processing or generation, in general3%
H02NElectric machines not otherwise provided for3%
H05BElectric heating3%
PatentTitleYear
11,053,590Nozzle for uniform plasma processing202110,930,542Apparatus for handling various sized substrates202110,784,134Image based substrate mapper202010,777,442Hybrid substrate carrier202010,566,226Multi-cassette carrying case202010,504,762Bridging front opening unified pod (FOUP)201910,465,288Nozzle for uniform plasma processing201910,446,423Next generation warpage measurement system201910,347,516Substrate transfer chamber201910,325,790Methods and apparatus for correcting substrate deformity201910,153,187Methods and apparatus for transferring a substrate20189,818,624'Methods and apparatus for correcting substrate deformity'2017Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2017–2021Patents assigned to APPLIED MATERIALS INC (12)· patent assignee history
2017–2021Based in Singapore, SG· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 12 | 2017–2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| Singapore, SG | 12 | 2017–2021 |