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Inventor

Yudai Tadaki

Inventor
Tsukuba, JP

Overview

4→
Patents
2012–2017
Patent span
Electricity
Primary field (CPC H)

Patents· 4 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C23Cprimary
C23CCoating metallic material44%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
H01LSemiconductor devices22%
PatentTitleYear
9,683,288'Method of manufacturing semiconductor device and method of cleaning processing vessel'20179,540,727'Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus and recording medium'20178,679,259'Substrate processing apparatus, method of manufacturing semiconductor device and method of cleaning processing vessel'20148,308,871'Thermal cleaning gas production and supply system'2012

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2012–2017Patents assigned to AIR LIQUIDE (4)· patent assignee history
2012–2014Patents assigned to TADAKI YUDAI (2)· patent assignee history
2012–2014Based in Ibaraki, JP· patent location history
2014–2017Patents assigned to HITACHI INT ELECTRIC INC (3)· patent assignee history
2014Patents assigned to KAMEDA KENJI (1)· patent assignee history
2014Patents assigned to SONOBE JUN (1)· patent assignee history
2017Based in Tsukuba, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
AIR LIQUIDE42012–2017
HITACHI INT ELECTRIC INC32014–2017
TADAKI YUDAIself22012–2014
KAMEDA KENJI12014
SONOBE JUN12014
Locations
LocationPatentsSpan
Tsukuba, JP22017
Ibaraki, JP22012–2014