Inventor
JAGAN RANGARAJAN
Inventor
US
Overview
Patents· 15 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1030%
H01LSemiconductor devices28%
B24BMachines, devices, or processes for grinding or polishing17%
B08BCleaning in general11%
A46BBrushes2%
B25JManipulators2%
B65GTransport or storage devices, e.g. conveyors for loading or tipping, shop conveyor systems or pneumatic tube conveyors2%
F16KValves2%
F16LPipes2%
G05BControl or regulating systems in general2%
PatentTitleYear
12,525,468Integrated clean and dry module for cleaning a substrate202612,521,841Pad carrier assembly for horizontal pre-clean module202612,500,094Modular fluid delivery assembly202512,400,892High throughput polishing modules and modular polishing systems202512,394,651High throughput polishing modules and modular polishing systems202512,198,944Substrate handling in a modular polishing system with single substrate cleaning chambers202512,142,513Wafer processing tools and methods thereof202411,942,319Pad carrier for horizontal pre-clean module202411,745,227Substrate cleaning devices and methods thereof202311,749,552Wafer processing tools and methods thereof202311,735,438Methods and apparatus for Marangoni drying202311,721,563Non-contact clean module202311,705,354Substrate handling systems202311,693,435Ethercat liquid flow controller communication for substrate processing systems202311,289,347Non-contact clean module2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to APPLIED MATERIALS INC (15)· patent assignee history
2022–2026Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 15 | 2022–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 15 | 2022–2026 |