Inventor
HUNG-CHIH WANG
Inventor
TW
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices24%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
C23CCoating metallic material17%
B05CApparatus for applying fluent materials to surfaces, in general7%
B65GTransport or storage devices, e.g. conveyors for loading or tipping, shop conveyor systems or pneumatic tube conveyors7%
F16LPipes7%
H01JElectric discharge tubes or discharge lamps7%
B08BCleaning in general3%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h103%
PatentTitleYear
12,562,347Connect structure for semiconductor processing equipment202612,557,584Semiconductor processing station and semiconductor process using the same202612,394,647Wafer shift detection202512,241,157System and method for cleaning a pre-clean process chamber202512,142,514Clamp ring and method of using clamp ring202412,040,163Connect structure for semiconductor processing equipment202412,020,994Power alarm and fire loading risk reduction for a deposition tool202412,002,699Wafer pod transfer assembly202411,600,506Wafer pod transfer assembly202311,462,425Semiconductor processing station2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (10)· patent assignee history
2022–2026Based in TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 10 | 2022–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| TW | 10 | 2022–2026 |