Inventor
Zion Koren
Inventor
Sunnyvale, CA, US
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
C23CCoating metallic material28%
C30BSingle-crystal growth17%
B05CApparatus for applying fluent materials to surfaces, in general6%
F27BFurnaces, kilns, ovens or retorts in general6%
F27DDetails or accessories of furnaces, kilns, ovens or retorts, in so far as they are of kinds occurring in more than one kind of furnace6%
G02BOptical elements, systems or apparatus6%
PatentTitleYear
7,949,237'Heating configuration for use in thermal processing chambers'20117,269,343'Heating configuration for use in thermal processing chambers'20076,970,644'Heating configuration for use in thermal processing chambers'20056,770,146'Method and system for rotating a semiconductor wafer in processing chambers'20046,717,158'Heating device for heating semiconductor wafers in thermal processing chambers'20046,559,424'Windows used in thermal processing chambers'2003Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2003–2011Patents assigned to MATTSON TECH INC (6)· patent assignee history
2003–2011Based in Sunnyvale, CA, US· patent location history
2004Based in Cupertino, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| MATTSON TECH INC | 6 | 2003–2011 |
Locations
| Location | Patents | Span |
|---|---|---|
| Sunnyvale, California, US | 5 | 2003–2011 |
| Cupertino, California, US | 1 | 2004 |