Inventor
Toshiharu Wada
Inventor
Miyagi, JP
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps16%
H01LSemiconductor devices16%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1016%
H05HPlasma technique11%
Y10TTechnical subjects covered by former us classification11%
F15BSystems acting by means of fluids in general5%
F16BDevices for fastening or securing constructional elements or machine parts together, e.g. nails, bolts, circlips, clamps, clips or wedges5%
F16KValves5%
F16NLubricating5%
G05DSystems for controlling or regulating non-electric variables5%
PatentTitleYear
10,861,739Method of patterning low-k materials using thermal decomposition materials202010,128,085Method of plasma etching20189,847,231Method of etching20179,583,317'Plasma processing method and plasma processing apparatus'20177,007,713'Pressure control apparatus'20066,913,115'Fluid pressure-operated apparatus-connecting device'20056,145,627'Zero point position-determining mechanism for pressurized fluid-driven apparatuses'2000Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2000–2005Patents assigned to SMC KK (2)· patent assignee history
2000–2005Based in Tsukuba, JP· patent location history
2006Patents assigned to SMC CORP (1)· patent assignee history
2006Based in Yawara-mura, JP· patent location history
2017–2020Patents assigned to TOKYO ELECTRON LTD (4)· patent assignee history
2017–2018Based in Miyagi, JP· patent location history
2020Based in Albany, NY, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 4 | 2017–2020 |
| SMC KK | 2 | 2000–2005 |
| SMC CORP | 1 | 2006 |
Locations
| Location | Patents | Span |
|---|---|---|
| Miyagi, JP | 3 | 2017–2018 |
| Tsukuba, JP | 2 | 2000–2005 |
| Albany, New York, US | 1 | 2020 |
| Yawara-mura, JP | 1 | 2006 |