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Inventor

Hidetoshi Nakao

Inventor
Beaverton, OR, US

Overview

2→
Patents
2009–2017
Patent span
Electricity
Primary field (CPC H)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1050%
H01LSemiconductor devices25%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests25%
PatentTitleYear
9,768,039'Substrate processing apparatus'20177,581,335'Substrate drying processing apparatus, method, and program recording medium'2009

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2009–2017Patents assigned to TOKYO ELECTRON LTD (2)· patent assignee history
2009Based in Tosu, JP· patent location history
2017Based in Beaverton, OR, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD22009–2017
Locations
LocationPatentsSpan
Beaverton, OR, US12017
Tosu, JP12009