Inventor
Martin von Hodenberg
Inventor
Oberkochen, DE
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices41%
G02BOptical elements, systems or apparatus18%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1014%
G03BApparatus or arrangements for taking photographs or for projecting or viewing them9%
B82YSpecific uses or applications of nanostructures5%
G06FElectric digital data processing5%
G21KHandling of particles or ionising radiation not otherwise provided for5%
H01SDevices using the process of light amplification by stimulated emission of radiation [laser] to amplify or generate light5%
PatentTitleYear
10,303,063Projection exposure apparatus with at least one manipulator201910,018,907Method of operating a microlithographic projection apparatus20189,829,800System correction from long timescales20179,817,316'Projection exposure method and projection exposure apparatus for microlithography'20179,606,446'Reflective optical element for EUV lithography and method of manufacturing a reflective optical element'20179,372,411'Projection objective of a microlithographic projection exposure apparatus'20169,348,234'Microlithographic apparatus'20169,170,497'Projection exposure apparatus with at least one manipulator'20159,134,613'Illumination and displacement device for a projection exposure apparatus'2015Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2015–2019Patents assigned to ZEISS CARL SMT GMBH (9)· patent assignee history
2015–2019Based in Oberkochen, DE· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ZEISS CARL SMT GMBH | 9 | 2015–2019 |
Locations
| Location | Patents | Span |
|---|---|---|
| Oberkochen, DE | 9 | 2015–2019 |