Inventor
Swayambhu P. Behera
Inventor
Santa Clara, CA, US
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices36%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1036%
C23CCoating metallic material18%
H02NElectric machines not otherwise provided for9%
PatentTitleYear
10,403,535Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system201910,325,800High temperature electrostatic chucking with dielectric constant engineered in-situ charge trap materials201910,074,534Ultra-conformal carbon film deposition20189,721,784'Ultra-conformal carbon film deposition'2017Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2017–2019Patents assigned to APPLIED MATERIALS INC (4)· patent assignee history
2017–2019Based in Santa Clara, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 4 | 2017–2019 |
Locations
| Location | Patents | Span |
|---|---|---|
| Santa Clara, California, US | 4 | 2017–2019 |