Inventor

YUKIFUMI YOSHIDA

Inventor

JP

Overview

2021–2026

Patent span

Electricity

Primary field (CPC H)

Patents· 17 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary

H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1031%

B08BCleaning in general29%

H01LSemiconductor devices20%

G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices11%

C11DDetergent compositions5%

B05BSpraying apparatus2%

B05DProcesses for applying fluent materials to surfaces, in general2%

PatentTitleYear

12,581,891Substrate processing method, substrate processing device, and processing fluid2026 12,551,935Substrate processing method, substrate processing apparatus, and processing liquid2026 12,403,500Substrate processing with polymer-containing liquid2025 12,269,068Substrate processing method and substrate processing device2025 11,921,426Substrate processing method, substrate processing apparatus, and recipe selection method2024 11,919,051Substrate cleaning apparatus and substrate cleaning method2024 11,901,173Substrate processing method2024 11,872,605Substrate processing method and substrate processing apparatus2024 11,710,629Substrate processing apparatus and substrate processing method2023 11,543,752Substrate processing method, substrate processing apparatus, and recipe selection method2023 11,517,941Substrate processing method and substrate processing apparatus2022 11,501,984Substrate processing device and substrate processing method2022 11,413,662Substrate cleaning apparatus and substrate cleaning method2022 11,404,292Substrate processing method and substrate processing apparatus2022 11,342,190Substrate processing apparatus and substrate processing method2022 11,260,431Substrate processing method and substrate processing apparatus2022 11,211,241Substrate processing method and substrate processing apparatus2021

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2021–2026Patents assigned to SCREEN HOLDINGS CO LTD (17)· patent assignee history

2021–2022Patents assigned to MERCK PATENT GMBH (2)· patent assignee history

2021–2026Based in JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees

Assignee	Patents	Span
SCREEN HOLDINGS CO LTD	17	2021–2026
MERCK PATENT GMBH	2	2021–2022

Locations

Location	Patents	Span
JP	17	2021–2026