Inventor
Yong-pil Han
Inventor
Seoul, KR
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1038%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests19%
B08BCleaning in general15%
H10BElectronic memory devices8%
H10DInorganic electric semiconductor devices8%
C09GPolishing compositions4%
C23FNon-mechanical removal of metallic material from surface4%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h104%
PatentTitleYear
7,413,959'Semiconductor device including a planarized surface and method thereof'20087,237,561'Apparatus for cleaning semiconductor wafer including heating using a light source and method for cleaning wafer using the same'20077,230,293'Storage nodes of a semiconductor memory'20077,153,370'Method of cleaning semiconductor wafer'20066,903,024'Method of manufacturing storage nodes of a semiconductor memory device using a two-step etching process'20056,887,137'Chemical mechanical polishing slurry and chemical mechanical polishing method using the same'20056,860,277'Single type of semiconductor wafer cleaning device'20056,740,247'HF vapor phase wafer cleaning and oxide etching'20046,712,078'Apparatus for cleaning semiconductor wafer and method for cleaning wafer using the same'20046,107,166'Vapor phase cleaning of alkali and alkaline earth metals'2000Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2000–2004Patents assigned to MASSACHUSETTS INST TECHNOLOGY (2)· patent assignee history
2000Patents assigned to FSI INT INC (1)· patent assignee history
2000Based in Boston, MA, US· patent location history
2004–2007Patents assigned to SAMSUNG ELECTRONICS CO LTD (7)· patent assignee history
2004–2007Based in Seoul, KR· patent location history
2005–2008Based in Ann Arbor, MI, US· patent location history
2008Patents assigned to SAMSUNG ELECTRONICS CO L T D (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SAMSUNG ELECTRONICS CO LTD | 7 | 2004–2007 |
| MASSACHUSETTS INST TECHNOLOGY | 2 | 2000–2004 |
| FSI INT INC | 1 | 2000 |
| SAMSUNG ELECTRONICS CO L T D | 1 | 2008 |
Locations
| Location | Patents | Span |
|---|---|---|
| Seoul, KR | 7 | 2004–2007 |
| Ann Arbor, MI, US | 2 | 2005–2008 |
| Boston, Massachusetts, US | 1 | 2000 |