Inventor
Akiou Kikuchi
Inventor
Ube, JP
Overview
Patents· 16 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices20%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
C01BNon-metallic elements8%
C07CAcyclic or carbocyclic compounds8%
C09KMaterials for miscellaneous applications, not provided for elsewhere8%
C25BElectrolytic or electrophoretic processes for the production of compounds or non-metals8%
B01DSeparation5%
B01JChemical or physical processes, e.g. catalysis or colloid chemistry3%
B08BCleaning in general3%
C23CCoating metallic material3%
PatentTitleYear
10,156,012Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and a non-transitory computer-readable recording medium201810,153,153Method for removing adhering matter and dry etching method201810,121,647Method for removing adhering matter and dry etching method20189,852,914Sacrificial-film removal method and substrate processing device20179,728,422'Dry etching method'20179,708,720'Gas generation device'20179,676,626'IF7-derived iodine fluoride compound recovery method and recovery device'20179,524,877'Silicon dry etching method'20169,238,872'Method for synthesizing fluorine compound by electrolysis and electrode therefor'20169,230,821'Dry etching agent and dry etching method using the same'20169,097,688'Method and device for measuring water content in hydrogen fluoride-containing fluoride salt compounds'20159,093,388'Dry etching agent and dry etching method using the same'20159,082,725'Pattern forming method'20159,017,571'Dry etching agent and dry etching method'20158,864,961'Fluorine gas generating apparatus'20148,105,566'Method for producing oxygen-containing halogenated fluoride'2012Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2012–2018Patents assigned to CENTRAL GLASS CO LTD (15)· patent assignee history
2012–2016Patents assigned to KIKUCHI AKIOU (7)· patent assignee history
2012–2016Patents assigned to MORI ISAMU (4)· patent assignee history
2012–2018Based in Ube, JP· patent location history
2015Patents assigned to UMEZAKI TOMONORI (3)· patent assignee history
2015Patents assigned to HIBINO YASUO (2)· patent assignee history
2015–2018Based in Yamaguchi, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| CENTRAL GLASS CO LTD | 15 | 2012–2018 |
| KIKUCHI AKIOUself | 7 | 2012–2016 |
| MORI ISAMU | 4 | 2012–2016 |
| UMEZAKI TOMONORI | 3 | 2015 |
| HIBINO YASUO | 2 | 2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Ube, JP | 12 | 2012–2018 |
| Yamaguchi, JP | 4 | 2015–2018 |