Inventor

Xiao Yang

Inventor

Cupertino, CA, US

Overview

2004–2017

Patent span

Physics

Primary field (CPC G)

Patents· 61 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G02Bprimary

G02BOptical elements, systems or apparatus26%

B81CProcesses or apparatus specially adapted for the manufacture or treatment of microstructural devices or systems15%

B81BMicrostructural devices or systems, e.g. micromechanical devices12%

H10DInorganic electric semiconductor devices7%

H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h105%

H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h104%

Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests4%

H01LSemiconductor devices3%

H03HImpedance networks, e.g. resonant circuits3%

G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices3%

PatentTitleYear

9,595,479'Method and structure of three dimensional CMOS transistors with hybrid crystal orientations'2017 9,365,412'Integrated CMOS and MEMS devices with air dieletrics'2016 9,150,406'Multi-axis integrated MEMS devices with CMOS circuits and method therefor'2015 8,999,835'Method and structure of monolithically integrated ESD supperssion device'2015 8,936,959'Integrated rf MEMS, control systems and methods'2015 8,908,255'Fabrication of a high fill ratio silicon spatial light modulator'2014 8,796,746'Method and structure of monolithically integrated pressure sensor using IC foundry-compatible processes'2014 8,796,790'Method and structure of monolithetically integrated micromachined microphone using IC foundry-compatiable processes'2014 8,749,004'Method and structure of sensors or electronic devices using vertical mounting'2014 8,742,520'Three axis magnetic sensor device and method'2014 8,704,238'Method and structure of monolithically integrated IC-MEMS oscillator using IC foundry-compatible processes'2014 8,592,993'Method and structure of integrated micro electro-mechanical systems and electronic devices using edge bond pads'2013 8,569,180'Method and structure of wafer level encapsulation of integrated circuits with cavity'2013 8,530,258'Method and apparatus for MEMS oscillator'2013 8,506,529'Method and structure of monolithetically integrated microneedle biochip'2013 8,432,005'Method and structure of monolithetically integrated inertial sensor using IC foundry-compatible processes'2013 8,314,984'Method and system for optical MEMS with flexible landing structures'2012 8,227,911'Method and structure of wafer level encapsulation of integrated circuits with cavity'2012 8,227,285'Method and structure of monolithetically integrated inertial sensor using IC foundry-compatible processes'2012 8,159,740'Fabrication of a high fill ratio silicon spatial light modulator'2012 8,148,781'Method and structures of monolithically integrated ESD suppression device'2012 8,119,432'Method and apparatus for MEMS oscillator'2012 8,120,076'Method and structure of monolithically integrated infrared sensing device'2012 8,105,736'Method and system for overlay correction during photolithography'2012 8,071,398'Method and structure of monolithically integrated IC-MEMS oscillator using IC foundry-compatible processes'2011 8,066,890'Spatial light modulator with multi-layer landing structures'2011 7,928,632'Method and structure for an out-of-plane compliant micro actuator'2011 7,923,789'Method of fabricating reflective spatial light modulator having high contrast ratio'2011 7,863,697'Method and apparatus for MEMS oscillator'2011 7,678,288'Method and structure for manufacturing bonded substrates using multiple photolithography tools'2010 7,675,670'Fabrication of a high fill ratio silicon spatial light modulator'2010 7,670,880'Method and structure for forming an integrated spatial light modulator'2010 7,608,933'Method and structure for kinetic energy based generator for portable electronic devices'2009 7,570,416'Method and apparatus for a reflective spatial light modulator with a flexible pedestal'2009 7,522,330'High fill ratio silicon spatial light modulator'2009 7,502,158'Method and structure for high fill factor spatial light modulator with integrated spacer layer'2009 7,498,715'Method and structure for an out-of plane compliant micro actuator'2009 7,473,616'Method and system for wafer bonding of structured substrates for electro-mechanical devices'2009 7,473,912'Method and apparatus for patterning micro and nano structures using a mask-less process'2009 7,453,624'Projection display system including a high fill ratio silicon spatial light modulator'2008 7,428,094'Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge'2008 7,382,519'Method and device for fabricating a release structure to facilitate bonding of mirror devices onto a substrate'2008 7,382,513'Spatial light modulator with multi-layer landing structures'2008 7,374,962'Method of fabricating reflective spatial light modulator having high contrast ratio'2008 7,298,539'Co-planar surface and torsion device mirror structure and method of manufacture for optical displays'2007 7,280,263'Reflective spatial light modulator'2007 7,245,416'Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge'2007 7,233,428'Method and apparatus for a reflective spatial light modulator with a flexible pedestal'2007 7,190,508'Method and structure of patterning landing pad structures for spatial light modulators'2007 7,184,195'Method and structure reducing parasitic influences of deflection devices in an integrated spatial light modulator'2007 7,172,921'Method and structure for forming an integrated spatial light modulator'2007 7,142,349'Method and structure for reducing parasitic influences of deflection devices on spatial light modulators'2006 7,118,234'Reflective spatial light modulator'2006 7,109,066'Method and device for forming spacer structures for packaging optical reflection devices'2006 7,109,120'Profiled standoff structure and method for optical display package'2006 7,092,140'Architecture of a reflective spatial light modulator'2006 7,068,417'Method and apparatus for a reflective spatial light modulator with a flexible pedestal'2006 7,034,984'Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge'2006 7,022,245'Fabrication of a reflective spatial light modulator'2006 6,992,810'High fill ratio reflective spatial light modulator with hidden hinge'2006 6,771,851'Fast switching method for a micro-mirror device for optical switching applications'2004

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2004Based in Fremont, CA, US· patent location history

2006–2014Patents assigned to MIRADIA INC (37)· patent assignee history

2006–2017Based in Cupertino, CA, US· patent location history

2006–2008Based in Sunnyvale, CA, US· patent location history

2009–2015Patents assigned to YANG XIAO CHARLES (14)· patent assignee history

2009–2014Patents assigned to YANG XIAO (9)· patent assignee history

2009Based in Palo Alto, CA, US· patent location history

2011–2017Patents assigned to MCUBE INC (19)· patent assignee history

2012–2014Patents assigned to JI WOOK (6)· patent assignee history

2015Based in San Jose, CA, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees

Assignee	Patents	Span
MIRADIA INC	37	2006–2014
MCUBE INC	19	2011–2017
YANG XIAO CHARLESself	14	2009–2015
YANG XIAOself	9	2009–2014
JI WOOK	6	2012–2014

Locations

Location	Patents	Span
Cupertino, California, US	50	2006–2017
Sunnyvale, California, US	8	2006–2008
San Jose, California, US	1	2015
Palo Alto, California, US	1	2009
Fremont, California, US	1	2004