Inventor
Mehran Asdigha
Inventor
Shrewsbury, MA, US
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1045%
H01JElectric discharge tubes or discharge lamps27%
H05BElectric heating18%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests9%
PatentTitleYear
7,267,520'Wafer scanning system with reciprocating rotary motion utilizing springs and counterweights'20077,119,343'Mechanical oscillator for wafer scan with spot beam'20067,112,808'Wafer 2D scan mechanism'20066,987,272'Work piece transfer system for an ion beam implanter'20066,046,435'Method of heating a substrate with multiple selectively deactuated heaters'20005,911,896'Substrate heating apparatus with glass-ceramic panels and thin film ribbon heater element'1999Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1999–2000Patents assigned to BROOKS AUTOMATION INC (2)· patent assignee history
1999–2000Based in Brighton, MA, US· patent location history
2006–2007Patents assigned to AXCELIS TECH INC (4)· patent assignee history
2006–2007Based in Shrewsbury, MA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| AXCELIS TECH INC | 4 | 2006–2007 |
| BROOKS AUTOMATION INC | 2 | 1999–2000 |
Locations
| Location | Patents | Span |
|---|---|---|
| Shrewsbury, Massachusetts, US | 4 | 2006–2007 |
| Brighton, Massachusetts, US | 2 | 1999–2000 |