Inventor
Nitesh Pandey
Inventor
Eindhoven, NL
Overview
Patents· 29 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices41%
G01NInvestigating or analysing materials by determining their chemical or physical properties24%
G01BMeasuring length, thickness or similar linear dimensions19%
G02BOptical elements, systems or apparatus4%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light3%
F21VFunctional features or details of lighting devices or systems thereof1%
F21YIndexing scheme associated with subclasses f21k, f21l, f21s and f21v, relating to the form or the kind of the light sources or of the colour of the light emitted1%
G03HHolographic processes or apparatus1%
G06FElectric digital data processing1%
G06TImage data processing or generation, in general1%
PatentTitleYear
10,949,375Methods and apparatus for an interface202110,866,526Metrology method and device202010,845,304Scatterometer and method of scatterometry using acoustic radiation202010,816,909Metrology system and method for determining a characteristic of one or more structures on a substrate202010,795,269Method of determining a value of a parameter of interest, method of cleaning a signal containing information about a parameter of interest, device manufacturing method202010,788,758Method of measuring a parameter of interest, device manufacturing method, metrology apparatus, and lithographic system202010,775,704Method of measuring a structure, inspection apparatus, lithographic system, device manufacturing method and wavelength-selective filter for use therein202010,747,124Method of measuring a target, metrology apparatus, polarizer assembly202010,678,145Radiation receiving system202010,670,975Adjustment of a metrology apparatus or a measurement thereby based on a characteristic of a target measured202010,656,534Method of measuring, device manufacturing method, metrology apparatus, and lithographic system202010,620,550Metrology method and apparatus202010,599,047Metrology apparatus, lithographic system, and method of measuring a structure202010,444,638Method for parameter determination and apparatus thereof201910,444,640Metrology apparatus, lithographic system, and method of measuring a structure201910,423,077Metrology method and apparatus, computer program and lithographic system201910,393,514Topography measurement system201910,394,143Topography measurement system201910,386,735Lithographic apparatus alignment sensor and method201910,365,565Method of measuring a structure, inspection apparatus, lithographic system, device manufacturing method and wavelength-selective filter for use therein201910,353,298Method of measuring a target, metrology apparatus, polarizer assembly201910,310,389Method of measuring, device manufacturing method, metrology apparatus, and lithographic system201910,234,767Device and method for processing a radiation beam with coherence201910,191,391Metrology method and apparatus, computer program and lithographic system201910,180,630Illumination system for a lithographic or inspection apparatus201910,067,426Metrology apparatus for measuring a structure formed on a substrate by a lithographic process, lithographic system, and method of measuring a structure formed on a substrate by a lithographic process20189,982,991Method for controlling a distance between two objects, inspection apparatus and method20189,909,983'Method and apparatus for improving measurement accuracy'20189,632,039'Inspection apparatus, inspection method and manufacturing method'2017Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2017–2020Patents assigned to ASML NETHERLANDS BV (28)· patent assignee history
2017–2020Based in Eindhoven, NL· patent location history
2020Patents assigned to ASML HOLDING NV (1)· patent assignee history
2020Patents assigned to KOOLEN ARMAND EUGENE ALBERT (1)· patent assignee history
2020Patents assigned to PANDEY NITESH (1)· patent assignee history
2021Patents assigned to SEMICONDUCTOR COMPONENTS IND LLC (1)· patent assignee history
2021Based in Mumbai, IN· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 28 | 2017–2020 |
| ASML HOLDING NV | 1 | 2020 |
| KOOLEN ARMAND EUGENE ALBERT | 1 | 2020 |
| PANDEY NITESHself | 1 | 2020 |
| SEMICONDUCTOR COMPONENTS IND LLC | 1 | 2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| Eindhoven, NL | 28 | 2017–2020 |
| Mumbai, IN | 1 | 2021 |