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Inventor

Alexander VOLFMAN

Inventor
US

Overview

2→
Patents
2022–2025
Patent span
Physics
Primary field (CPC G)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G01Bprimary
G01BMeasuring length, thickness or similar linear dimensions33%
G01NInvestigating or analysing materials by determining their chemical or physical properties33%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices33%
PatentTitleYear
12,487,190System and method for isolation of specific fourier pupil frequency in overlay metrology202511,378,394On-the-fly scatterometry overlay metrology target2022

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2022–2025Patents assigned to KLA CORP (2)· patent assignee history
2022–2025Based in US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
KLA CORP22022–2025
Locations
LocationPatentsSpan
US22022–2025