Inventor
THEODOROS PANAGOPOULOS
Inventor
US
Overview
Patents· 3 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices38%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1038%
F16KValves25%
PatentTitleYear
12,253,190Non-elastomeric, non-polymeric, non-metallic membrane valves for semiconductor processing equipment202511,796,085Non-elastomeric, non-polymeric, non-metallic membrane valves for semiconductor processing equipment202311,380,556Thermal atomic layer etch with rapid temperature cycling2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to LAM RES CORP (3)· patent assignee history
2022–2025Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 3 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 3 | 2022–2025 |