Inventor
Haruo Tsuchikawa
Inventor
Yokohama, JP
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
B82YSpecific uses or applications of nanostructures25%
H03MCoding8%
PatentTitleYear
4,968,893'Scanning electron beam exposure system'19904,585,943'Electron beam exposure apparatus'19864,586,141'Method and apparatus for an electron beam exposure system'19864,583,077'Deflection system in an electron beam exposure device'19864,516,030'Scanning electron beam exposure system'1985Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1985–1990Patents assigned to FUJITSU LTD (5)· patent assignee history
1985–1990Based in Yokohama, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| FUJITSU LTD | 5 | 1985–1990 |
Locations
| Location | Patents | Span |
|---|---|---|
| Yokohama, JP | 5 | 1985–1990 |