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Inventor

Andreas Michel

Inventor
Eggenstein-Leopoldshafen, DE

Overview

1→
Patents
1998
Patent span
Performing operations
Primary field (CPC B)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

B81Cprimary
B81CProcesses or apparatus specially adapted for the manufacture or treatment of microstructural devices or systems50%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices50%
PatentTitleYear
5,759,616'Process for producing microstructure components on a substrate'1998

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1998Patents assigned to KERNFORSCHUNGSZ KARLSRUHE (1)· patent assignee history
1998Based in Eggenstein-Leopoldshafen, DE· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
KERNFORSCHUNGSZ KARLSRUHE11998
Locations
LocationPatentsSpan
Eggenstein-Leopoldshafen, DE11998