LexDanaLexDanabeta
Inventor

Keiji KITAGAITO

Inventor
JP

Overview

2→
Patents
2022–2024
Patent span
Electricity
Primary field (CPC H)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C23Cprimary
C23CCoating metallic material20%
H01JElectric discharge tubes or discharge lamps20%
H01LSemiconductor devices20%
H10DInorganic electric semiconductor devices20%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
PatentTitleYear
12,062,522Plasma etching method and plasma etching apparatus202411,355,352Plasma etching method and plasma etching apparatus2022

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2022–2024Patents assigned to TOKYO ELECTRON LTD (2)· patent assignee history
2022–2024Based in JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD22022–2024
Locations
LocationPatentsSpan
JP22022–2024