Inventor
Ozkan OZTURK
Inventor
US
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
H01LSemiconductor devices20%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices15%
H10DInorganic electric semiconductor devices10%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1010%
B23BTurning5%
B25BTools or bench devices not otherwise provided for, for fastening, connecting, disengaging, or holding5%
B29CShaping or joining of plastics5%
B29KIndexing scheme associated with subclasses b29b, b29c or b29d, relating to moulding materials or to materials for moulds, reinforcements, fillers or preformed parts, e.g. inserts5%
PatentTitleYear
12,300,522Apparatus including a substrate chuck, a dispenser, and a planarization head and methods of using the same202512,283,522Planarization apparatus, planarization process, and method of manufacturing an article202512,138,747Planarization process, apparatus and method of manufacturing an article202411,776,840Superstrate chuck, method of use, and method of manufacturing an article202311,562,924Planarization apparatus, planarization process, and method of manufacturing an article2023Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2023–2025Patents assigned to CANON KK (5)· patent assignee history
2023–2025Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| CANON KK | 5 | 2023–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 5 | 2023–2025 |