Inventor
Antti Rahtu
Inventor
Vantaa, FI
Overview
Patents· 20 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material36%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
H10DInorganic electric semiconductor devices13%
H01LSemiconductor devices11%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h109%
C30BSingle-crystal growth7%
PatentTitleYear
10,964,534Enhanced thin film deposition202110,294,563ALD of hafnium-containing films using cyclopentadienyl compounds201910,297,444Enhanced thin film deposition20199,850,575ALD of metal-containing films using cyclopentadienly compounds20179,831,094Enhanced thin film deposition20179,677,175'ALD of metal-containing films using cyclopentadienyl compounds'20179,670,582'ALD of metal-containing films using cyclopentadienyl compounds'20179,587,307'Enhanced deposition of noble metals'20179,273,391'ALD of zirconium-containing films using cyclopentadienyl compounds'20169,127,351'Enhanced thin film deposition'20158,993,055'Enhanced thin film deposition'20158,795,771'ALD of metal-containing films using cyclopentadienyl compounds'20148,685,165'Metal oxide films'20148,501,275'Enhanced deposition of noble metals'20138,048,484'Method for the deposition of a film by CVD or ALD'20118,025,922'Enhanced deposition of noble metals'20117,704,896'Atomic layer deposition of thin films on germanium'20107,377,976'Method for growing thin oxide films'20086,932,867'Method for growing thin oxide films'20056,632,279'Method for growing thin oxide films'2003Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2003–2008Based in Espoo, FI· patent location history
2005–2021Patents assigned to ASM INT (9)· patent assignee history
2008–2015Patents assigned to RAHTU ANTTI (4)· patent assignee history
2008–2014Patents assigned to LESKELA MARKKU (2)· patent assignee history
2010–2021Based in Vantaa, FI· patent location history
2013–2017Based in Helsinki, FI· patent location history
2016–2019Patents assigned to ASM IP HOLDING BV (5)· patent assignee history
2017–2021Patents assigned to ASM INT NV (4)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASM INT | 9 | 2005–2021 |
| ASM IP HOLDING BV | 5 | 2016–2019 |
| ASM INT NV | 4 | 2017–2021 |
| RAHTU ANTTIself | 4 | 2008–2015 |
| LESKELA MARKKU | 2 | 2008–2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Vantaa, FI | 14 | 2010–2021 |
| Helsinki, FI | 3 | 2013–2017 |
| Espoo, FI | 3 | 2003–2008 |