Inventor
Shoji Hotta
Inventor
Tokyo, JP
Overview
Patents· 15 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1032%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices17%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1017%
G06TImage data processing or generation, in general12%
H01JElectric discharge tubes or discharge lamps12%
H10DInorganic electric semiconductor devices5%
G01BMeasuring length, thickness or similar linear dimensions2%
G01NInvestigating or analysing materials by determining their chemical or physical properties2%
PatentTitleYear
10,002,743Measurement system and measurement method20189,659,744'Charged particle beam apparatus and inspection method using the same'20178,575,547'Electron beam measurement apparatus'20138,148,682'Method and apparatus for pattern position and overlay measurement'20127,943,903'Defect inspection method and its system'20117,884,325'Electron beam measurement apparatus'20117,419,916'Manufacturing method of semiconductor device'20087,387,867'Manufacturing method of semiconductor integrated circuit device'20087,109,127'Manufacturing method of semiconductor device'20066,939,649'Fabrication method of semiconductor integrated circuit device and mask'20056,774,020'Semiconductor device and method of manufacturing the same'20046,656,646'Fabrication method of semiconductor integrated circuit device'20036,555,464'Semiconductor device and method of manufacturing the same'20036,528,400'Method of manufacturing a semiconductor device'20036,340,632'Method of manufacturing a semiconductor device'2002Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2002–2012Patents assigned to HITACHI LTD (6)· patent assignee history
2002–2018Based in Tokyo, JP· patent location history
2003–2008Based in Ome, JP· patent location history
2004–2008Patents assigned to RENESAS TECH CORP (4)· patent assignee history
2004Based in Richmond, CA, US· patent location history
2011–2018Patents assigned to HITACHI HIGH TECH CORP (5)· patent assignee history
2011–2013Based in Delmar, NY, US· patent location history
2012–2013Patents assigned to HOTTA SHOJI (2)· patent assignee history
2013Patents assigned to FUKUDA MUNEYUKI (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| HITACHI LTD | 6 | 2002–2012 |
| HITACHI HIGH TECH CORP | 5 | 2011–2018 |
| RENESAS TECH CORP | 4 | 2004–2008 |
| HOTTA SHOJIself | 2 | 2012–2013 |
| FUKUDA MUNEYUKI | 1 | 2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Tokyo, JP | 6 | 2002–2018 |
| Delmar, New York, US | 4 | 2011–2013 |
| Ome, JP | 4 | 2003–2008 |
| Richmond, California, US | 1 | 2004 |