Inventor
Simon Yavelberg
Inventor
Cupertino, CA, US
Overview
Patents· 30 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B24Bprimary
B24BMachines, devices, or processes for grinding or polishing25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
H01JElectric discharge tubes or discharge lamps11%
H01LSemiconductor devices9%
B33YAdditive manufacturing, i.e. manufacturing of three-dimensional [3d] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3d printing, stereolithography or selective laser sintering5%
B22FWorking metallic powder3%
G01NInvestigating or analysing materials by determining their chemical or physical properties3%
Y02PClimate change mitigation technologies in the production or processing of goods3%
B05DProcesses for applying fluent materials to surfaces, in general2%
B08BCleaning in general2%
PatentTitleYear
10,946,496Chemical mechanical polishing retaining ring with integrated sensor202110,744,618Polishing pad with secondary window seal202010,656,100Surface acoustic wave sensors in semiconductor processing equipment202010,553,473Edge ring for a substrate processing chamber202010,513,008Chemical mechanical polishing smart ring201910,500,695Retaining ring having inner surfaces with features201910,399,202Retaining ring for lower wafer defects201910,290,459Magnetron having enhanced cooling characteristics201910,141,153Magnetron having enhanced cooling characteristics201810,094,788Surface acoustic wave sensors in semiconductor processing equipment201810,029,346External clamp ring for a chemical mechanical polishing carrier head20189,878,421'Chemical mechanical polishing retaining ring with integrated sensor'20189,744,640'Corrosion resistant retaining rings'20179,731,397'Polishing pad with secondary window seal'20179,731,399'Coated retaining ring'20179,403,256'Recording measurements by sensors for a carrier head'20169,384,122'High sampling rate sensor buffering in semiconductor processing systems'20169,339,914'Substrate polishing and fluid recycling system'20168,961,266'Polishing pad with secondary window seal'20158,250,695'Roller assembly for a brush cleaning device in a cleaning module'20127,407,433'Pad characterization tool'20087,241,203'Six headed carousel'20077,044,832'Load cup for chemical mechanical polishing'20066,367,410'Closed-loop dome thermal control apparatus for a semiconductor wafer processing system'20026,369,493'Microwave plasma applicator having a thermal transfer medium between a plasma containing tube and a cooling jacket'20026,326,597'Temperature control system for process chamber'20015,775,379'Insulation jacket for fluid carrying conduits'19985,767,781'Method for detection of failed heater in a daisy chain connection'19985,716,877'Process gas delivery system'19985,641,359'Process gas delivery system'1997Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1997–2021Patents assigned to APPLIED MATERIALS INC (30)· patent assignee history
1997–2021Based in Cupertino, CA, US· patent location history
2012Patents assigned to ATKINSON JIM K (1)· patent assignee history
2012Patents assigned to CHEN HUNG CHIH (1)· patent assignee history
2012Patents assigned to DOMIN JONATHAN (1)· patent assignee history
2012Patents assigned to KARUPPIAH LAKSHMANAN (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 30 | 1997–2021 |
| ATKINSON JIM K | 1 | 2012 |
| CHEN HUNG CHIH | 1 | 2012 |
| DOMIN JONATHAN | 1 | 2012 |
| KARUPPIAH LAKSHMANAN | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Cupertino, California, US | 30 | 1997–2021 |