Inventor
Charles S. Rhoades
Inventor
Los Gatos, CA, US
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1028%
H01JElectric discharge tubes or discharge lamps19%
C23CCoating metallic material16%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests16%
B08BCleaning in general13%
C23FNon-mechanical removal of metallic material from surface6%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices3%
PatentTitleYear
5,753,137'Dry cleaning of semiconductor processing chambers using non-metallic, carbon-comprising material'19985,685,916'Dry cleaning of semiconductor processing chambers'19975,676,759'Plasma dry cleaning of semiconductor processing chambers'19975,545,289'Passivating, stripping and corrosion inhibition of semiconductor substrates'19965,494,523'Controlling plasma particulates by contouring the plasma sheath using materials of differing RF impedances'19965,486,235'Plasma dry cleaning of semiconductor processing chambers'19965,423,918'Method for reducing particulate contamination during plasma processing of semiconductor devices'19955,387,556'Etching aluminum and its alloys using HC1, C1-containing etchant and N.sub. 2'19955,384,009'Plasma etching using xenon'19955,221,424'Method for removal of photoresist over metal which also removes or inactivates corosion-forming materials remaining from previous metal etch'1993Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1993–1998Patents assigned to APPLIED MATERIALS INC (10)· patent assignee history
1993–1998Based in Los Gatos, CA, US· patent location history
1996Patents assigned to INTEL CORP (1)· patent assignee history
1996Based in Simi Valley, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 10 | 1993–1998 |
| INTEL CORP | 1 | 1996 |
Locations
| Location | Patents | Span |
|---|---|---|
| Los Gatos, California, US | 9 | 1993–1998 |
| Simi Valley, California, US | 1 | 1996 |