Inventor
Tsuyoshi Nogami
Inventor
Koshi, JP
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1030%
H01LSemiconductor devices20%
F27DDetails or accessories of furnaces, kilns, ovens or retorts, in so far as they are of kinds occurring in more than one kind of furnace10%
F28DHeat-exchange apparatus, not provided for in another subclass, in which the heat-exchange media do not come into direct contact10%
G01KMeasuring temperature10%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices10%
G05DSystems for controlling or regulating non-electric variables10%
PatentTitleYear
10,359,320Method of measuring a temperature of a heat plate and method thereof201910,120,394Processing liquid supply device, processing liquid supply method, and storage medium20189,372,405'Chemical liquid supply method and chemical liquid supply system'20166,744,020'Heat processing apparatus'2004Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2004–2019Patents assigned to TOKYO ELECTRON LTD (4)· patent assignee history
2004Based in Kikuchi-gun, JP· patent location history
2016Patents assigned to FURUSHO TOSHINOBU (1)· patent assignee history
2016Patents assigned to NOGAMI TSUYOSHI (1)· patent assignee history
2016Patents assigned to OOKUBO TAKAHIRO (1)· patent assignee history
2016Patents assigned to SASA TAKASHI (1)· patent assignee history
2016–2019Based in Koshi, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 4 | 2004–2019 |
| FURUSHO TOSHINOBU | 1 | 2016 |
| NOGAMI TSUYOSHIself | 1 | 2016 |
| OOKUBO TAKAHIRO | 1 | 2016 |
| SASA TAKASHI | 1 | 2016 |
Locations
| Location | Patents | Span |
|---|---|---|
| Koshi, JP | 3 | 2016–2019 |
| Kikuchi-gun, JP | 1 | 2004 |