Inventor
Martin Scales
Inventor
San Jose, CA, US
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B24Bprimary
B24BMachines, devices, or processes for grinding or polishing38%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1038%
B25BTools or bench devices not otherwise provided for, for fastening, connecting, disengaging, or holding13%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests13%
PatentTitleYear
6,592,439'Platen for retaining polishing material'20036,520,841'Apparatus and methods for chemical mechanical polishing with an incrementally advanceable polishing sheet'20036,413,873'System for chemical mechanical planarization'20026,126,382'Apparatus for aligning substrate to chuck in processing chamber'2000Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2000Patents assigned to NOVELLUS SYSTEMS INC (1)· patent assignee history
2000–2003Based in San Jose, CA, US· patent location history
2002–2003Patents assigned to APPLIED MATERIALS INC (3)· patent assignee history
2003Patents assigned to MICRON TECHNOLOGY INC (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 3 | 2002–2003 |
| MICRON TECHNOLOGY INC | 1 | 2003 |
| NOVELLUS SYSTEMS INC | 1 | 2000 |
Locations
| Location | Patents | Span |
|---|---|---|
| San Jose, California, US | 4 | 2000–2003 |