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Inventor

Hiromitsu Kanbara

Inventor
Kawasaki, JP

Overview

3→
Patents
1996–2003
Patent span
Electricity
Primary field (CPC H)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1038%
H01JElectric discharge tubes or discharge lamps25%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests25%
C23FNon-mechanical removal of metallic material from surface13%
PatentTitleYear
6,553,277'Method and apparatus for vacuum treatment'20035,785,877'Dry etching method'19985,556,500'Plasma etching apparatus'1996

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1996–2003Patents assigned to TOKYO ELECTRON LTD (3)· patent assignee history
1996Patents assigned to TOSHIBA KK (1)· patent assignee history
1996–2003Based in Kawasaki, JP· patent location history
1998Patents assigned to NIPPON TELEGRAPH & TELEPHONE (1)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD31996–2003
NIPPON TELEGRAPH & TELEPHONE11998
TOSHIBA KK11996
Locations
LocationPatentsSpan
Kawasaki, JP31996–2003