Inventor
Sunao Aya
Inventor
Tokyo, JP
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices36%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1023%
H10DInorganic electric semiconductor devices14%
H01LSemiconductor devices9%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h109%
B81CProcesses or apparatus specially adapted for the manufacture or treatment of microstructural devices or systems5%
H01JElectric discharge tubes or discharge lamps5%
PatentTitleYear
10,043,635Ion implantation apparatus20189,188,872'Method for manufacturing semiconductor device'20159,093,361'Semiconductor device'20159,063,428'Method for manufacturing semiconductor device'20159,059,086'Method of manufacturing semiconductor device'20158,252,672'Silicon carbide semiconductor device comprising silicon carbide layer and method of manufacturing the same'20126,265,113'Stress adjustment method of X-ray mask'20016,212,252'X-ray mask provided with an alignment mark and method of manufacturing the same'20016,190,808'X-ray mask and method of manufacturing the same'20015,953,492'Method of manufacturing X-ray mask and heating apparatus'19995,834,142'Method of manufacturing X-ray mask and heating apparatus'19985,677,090'Method of making X-ray mask having reduced stress'1997Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1997–2018Patents assigned to MITSUBISHI ELECTRIC CORP (12)· patent assignee history
1997–2018Based in Tokyo, JP· patent location history
2001Based in Hyogo, JP· patent location history
2012–2015Patents assigned to AYA SUNAO (3)· patent assignee history
2012–2015Patents assigned to IMAIZUMI MASAYUKI (2)· patent assignee history
2012–2015Patents assigned to MIURA NARUHISA (2)· patent assignee history
2015Patents assigned to EBIIKE YUJI (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| MITSUBISHI ELECTRIC CORP | 12 | 1997–2018 |
| AYA SUNAOself | 3 | 2012–2015 |
| EBIIKE YUJI | 2 | 2015 |
| IMAIZUMI MASAYUKI | 2 | 2012–2015 |
| MIURA NARUHISA | 2 | 2012–2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Tokyo, JP | 9 | 1997–2018 |
| Hyogo, JP | 3 | 2001 |