Inventor
Kuei-Hsi Lai
Inventor
Hsinchu County, TW
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B05Cprimary
B05CApparatus for applying fluent materials to surfaces, in general33%
B05BSpraying apparatus11%
F16KValves11%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices11%
G05DSystems for controlling or regulating non-electric variables11%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1011%
Y10TTechnical subjects covered by former us classification11%
PatentTitleYear
6,334,581'Nozzle reposition device used in a resist coating process'20026,170,512'Flow control device'20016,099,646'Dispensing system of a coater'20006,076,569'Cup rinse with a valvular ring'20005,937,876'Rinsing system used in a photoresist coater with capability to avoid a reversed pressure effect'1999Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1999–2002Patents assigned to UNITED MICROELECTRONICS CORP (5)· patent assignee history
1999–2002Based in Hsinchu County, TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| UNITED MICROELECTRONICS CORP | 5 | 1999–2002 |
Locations
| Location | Patents | Span |
|---|---|---|
| Hsinchu County, TW | 5 | 1999–2002 |