LexDanaLexDanabeta
Inventor

Frank J. Hausman

Inventor
San Francisco, CA, US

Overview

1→
Patents
2000
Patent span
Performing operations
Primary field (CPC B)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

B24Bprimary
B24BMachines, devices, or processes for grinding or polishing50%
G05BControl or regulating systems in general50%
PatentTitleYear
6,010,538'In situ technique for monitoring and controlling a process of chemical-mechanical-polishing via a radiative communication link'2000

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2000Patents assigned to LUXTRON CORP (1)· patent assignee history
2000Based in San Francisco, CA, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
LUXTRON CORP12000
Locations
LocationPatentsSpan
San Francisco, California, US12000