Inventor
Alan E. Walter
Inventor
Exton, PA, US
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B08Bprimary
B08BCleaning in general29%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1023%
B05CApparatus for applying fluent materials to surfaces, in general17%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests17%
C23CCoating metallic material6%
C30BSingle-crystal growth6%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices3%
PatentTitleYear
6,491,763'Processes for treating electronic components'20026,348,101'Methods for treating objects'20026,143,087'Methods for treating objects'20004,984,597'Apparatus for rinsing and drying surfaces'19914,917,123'Apparatus for treating wafers with process fluids'19904,911,761'Process and apparatus for drying surfaces'19904,899,767'Method and system for fluid treatment of semiconductor wafers'19904,795,497'Method and system for fluid treatment of semiconductor wafers'19894,778,532'Process and apparatus for treating wafers with process fluids'19884,633,893'Apparatus for treating semiconductor wafers'1987Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1987–1990Patents assigned to CFM TECHNOLOGIES LTD (3)· patent assignee history
1987–2002Based in Exton, PA, US· patent location history
1990–1991Patents assigned to CFM TECHN RES ASS (2)· patent assignee history
1990Patents assigned to CFM TECHNOLOGIES INC (1)· patent assignee history
2000–2002Patents assigned to CFMT INC (2)· patent assignee history
2002Patents assigned to MATTSON TECHNOLOGY IP (1)· patent assignee history
2002Based in Chester Springs, PA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| CFM TECHNOLOGIES LTD | 3 | 1987–1990 |
| CFM TECHN RES ASS | 2 | 1990–1991 |
| CFMT INC | 2 | 2000–2002 |
| CFM TECHNOLOGIES INC | 1 | 1990 |
| MATTSON TECHNOLOGY IP | 1 | 2002 |
Locations
| Location | Patents | Span |
|---|---|---|
| Exton, Pennsylvania, US | 9 | 1987–2002 |
| Chester Springs, Pennsylvania, US | 1 | 2002 |