Inventor
Peter Paul Hempenius
Inventor
Nuenen, NL
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices60%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1013%
G01NInvestigating or analysing materials by determining their chemical or physical properties7%
G03BApparatus or arrangements for taking photographs or for projecting or viewing them7%
G10KSound-producing devices7%
H01JElectric discharge tubes or discharge lamps7%
PatentTitleYear
10,867,770E-beam apparatus202010,809,634Stage system and metrology tool202010,191,396Lithographic apparatus, object positioning system and device manufacturing method20199,946,172System for positioning an object in lithography20189,378,722'Lithographic apparatus with actuator to compensate acoustic vibration'20168,928,860'Lithographic apparatus having a chuck with a visco-elastic damping layer'20158,310,651'Lithographic apparatus, method and device manufacturing method'20127,969,550'Lithographic apparatus and device manufacturing method'20117,884,919'Lithographic apparatus and device manufacturing method'20117,742,149'Stage system and lithographic apparatus comprising such a stage system'2010Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2010–2020Patents assigned to ASML NETHERLANDS BV (10)· patent assignee history
2010–2020Based in Nuenen, NL· patent location history
2011Based in Luyksgestel, NL· patent location history
2012–2016Patents assigned to DE VOS YOUSSEF KAREL MARIA (3)· patent assignee history
2012–2016Patents assigned to HEMPENIUS PETER PAUL (3)· patent assignee history
2012–2016Patents assigned to GEERKE JOHAN HENDRIK (2)· patent assignee history
2012–2016Patents assigned to ROOZEN NICOLAAS BERNARDUS (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 10 | 2010–2020 |
| DE VOS YOUSSEF KAREL MARIA | 3 | 2012–2016 |
| HEMPENIUS PETER PAULself | 3 | 2012–2016 |
| GEERKE JOHAN HENDRIK | 2 | 2012–2016 |
| ROOZEN NICOLAAS BERNARDUS | 2 | 2012–2016 |
Locations
| Location | Patents | Span |
|---|---|---|
| Nuenen, NL | 9 | 2010–2020 |
| Luyksgestel, NL | 1 | 2011 |