Inventor
CHUNHUNG CHEN
Inventor
TW
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B24Bprimary
B24BMachines, devices, or processes for grinding or polishing50%
B32BLayered products, i.e. products built-up of strata of flat or non-flat, e.g. cellular or honeycomb, form13%
Y10TTechnical subjects covered by former us classification13%
G01NInvestigating or analysing materials by determining their chemical or physical properties6%
G06FElectric digital data processing6%
H01LSemiconductor devices6%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h106%
PatentTitleYear
12,172,262Irregular mechanical motion detection systems and method202412,115,767Pad removal method and device202412,070,833Method of using polishing pad202412,009,221Performing planarization process controls in semiconductor fabrication202411,731,232Irregular mechanical motion detection systems and method202311,691,243Method of using polishing pad202311,679,472Method for CMP pad conditioning202311,554,578Pad removal method2023Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2023–2024Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (8)· patent assignee history
2023–2024Based in TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 8 | 2023–2024 |
Locations
| Location | Patents | Span |
|---|---|---|
| TW | 8 | 2023–2024 |