Inventor
KENTO OGATA
Inventor
JP
Overview
Patents· 1 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B05Bprimary
B05BSpraying apparatus25%
B05CApparatus for applying fluent materials to surfaces, in general25%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
PatentTitleYear
11,273,464Substrate processing apparatus2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022Patents assigned to TOKYO ELECTRON LTD (1)· patent assignee history
2022Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 1 | 2022 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 1 | 2022 |