Inventor
SEI NEGORO
Inventor
JP
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices27%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1027%
B01FMixing, e.g. dissolving, emulsifying or dispersing7%
C09KMaterials for miscellaneous applications, not provided for elsewhere7%
G05DSystems for controlling or regulating non-electric variables7%
B05BSpraying apparatus5%
B05CApparatus for applying fluent materials to surfaces, in general5%
C30BSingle-crystal growth5%
B01DSeparation2%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices2%
PatentTitleYear
12,545,839Substrate processing method and substrate processing apparatus202612,476,124Substrate processing condition setting method, substrate processing method, substrate processing condition setting system, and substrate processing system202512,337,289Chemical liquid preparation device, and substrate processing device202512,334,366Substrate processing apparatus and substrate processing method202512,327,737Substrate treating apparatus202512,269,980Silicon etching solution and method for producing silicon device using the etching solution202512,064,739Chemical liquid preparation device, and substrate processing device202412,042,813Substrate processing method and substrate processing apparatus202411,670,517Substrate processing method and substrate processing device202311,466,206Silicon etching solution and method for producing silicon device using the etching solution202211,439,967Chemical liquid preparation method, chemical liquid preparation device, and substrate processing device202211,222,795Substrate processing method and substrate processing apparatus2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to SCREEN HOLDINGS CO LTD (12)· patent assignee history
2022–2025Patents assigned to TOKUYAMA CORP (2)· patent assignee history
2022–2026Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SCREEN HOLDINGS CO LTD | 12 | 2022–2026 |
| TOKUYAMA CORP | 2 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 12 | 2022–2026 |