Inventor
Jason Ferns
Inventor
Sunnyvale, CA, US
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices31%
G01BMeasuring length, thickness or similar linear dimensions23%
H01JElectric discharge tubes or discharge lamps15%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light8%
G01NInvestigating or analysing materials by determining their chemical or physical properties8%
H01LSemiconductor devices8%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h108%
PatentTitleYear
10,692,705Advanced optical sensor and method for detecting an optical event in a light emission signal in a plasma chamber202010,453,653Endpoint detection algorithm for atomic layer etching (ALE)20198,666,703'Method for automated determination of an optimally parameterized scatterometry model'20147,395,132'Optical metrology model optimization for process control'20087,221,989'Optical metrology model optimization for process control'20077,065,423'Optical metrology model optimization for process control'2006Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2006–2008Patents assigned to TIMBRE TECH INC (2)· patent assignee history
2006–2020Based in Sunnyvale, CA, US· patent location history
2007–2020Patents assigned to TOKYO ELECTRON LTD (4)· patent assignee history
2014Patents assigned to DZIURA THADDEUS (1)· patent assignee history
2014Patents assigned to FERNS JASON (1)· patent assignee history
2014Patents assigned to HENCH JOHN J (1)· patent assignee history
2014Based in Cupertino, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 4 | 2007–2020 |
| TIMBRE TECH INC | 2 | 2006–2008 |
| DZIURA THADDEUS | 1 | 2014 |
| FERNS JASONself | 1 | 2014 |
| HENCH JOHN J | 1 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Sunnyvale, California, US | 5 | 2006–2020 |
| Cupertino, California, US | 1 | 2014 |