Inventor
JONG-WOO SUN
Inventor
KR
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
H01LSemiconductor devices24%
H03HImpedance networks, e.g. resonant circuits5%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h105%
PatentTitleYear
11,837,496Substrate processing apparatus and method of processing a substrate202311,521,836Plasma processing apparatus202211,521,866Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatus202211,501,987Loadlock module and semiconductor manufacturing apparatus including the same202211,437,264Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device202211,437,222Plasma processing apparatus and method of manufacturing semiconductor device using the same202211,289,309Device for providing gas to a plasma chamber and a plasma processing device including the same202211,282,678Method of controlling uniformity of plasma and plasma processing system2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2023Patents assigned to SAMSUNG ELECTRONICS CO LTD (8)· patent assignee history
2022–2023Based in KR· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SAMSUNG ELECTRONICS CO LTD | 8 | 2022–2023 |
Locations
| Location | Patents | Span |
|---|---|---|
| KR | 8 | 2022–2023 |