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Inventor

Dmitry Gorelik

Inventor
Migdal Ha'emek, IL

Overview

2→
Patents
2021
Patent span
Physics
Primary field (CPC G)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices29%
G01BMeasuring length, thickness or similar linear dimensions14%
G01NInvestigating or analysing materials by determining their chemical or physical properties14%
G02BOptical elements, systems or apparatus14%
G02FOptical devices or arrangements for the control of light by modification of the optical properties of the media of the elements involved therein14%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1014%
PatentTitleYear
11,118,903Efficient illumination shaping for scatterometry overlay202110,976,562Nano-structured non-polarizing beamsplitter2021

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2021Patents assigned to KLA CORP (2)· patent assignee history
2021Patents assigned to KLA TENCOR CORP (2)· patent assignee history
2021Based in Migdal Ha'emek, IL· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
KLA CORP22021
KLA TENCOR CORP22021
Locations
LocationPatentsSpan
Migdal Ha'emek, IL22021