Inventor
Koos VAN BERKEL
Inventor
NL
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices50%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
G06FElectric digital data processing8%
G06NComputing arrangements based on specific computational models8%
H01LSemiconductor devices8%
PatentTitleYear
12,591,178Method for adjusting a patterning process202612,560,872Vacuum sheet bond fixturing and flexible burl applications for substrate tables202612,339,592Method for thermo-mechanical control of a heat sensitive element and device for use in a lithographic production process202512,276,918Method and apparatus for calculating a spatial map associated with a component202512,235,592Object holder, electrostatic sheet and method for making an electrostatic sheet202512,197,139Object holder, tool and method of manufacturing an object holder2025Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2025–2026Patents assigned to ASML NETHERLANDS BV (6)· patent assignee history
2025–2026Patents assigned to ASML HOLDING NV (2)· patent assignee history
2025–2026Based in NL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 6 | 2025–2026 |
| ASML HOLDING NV | 2 | 2025–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| NL | 6 | 2025–2026 |